#Teaching robotc pdf
Google Patents Self teaching robotic wafer handling systemÄownload PDF Info Publication number US6323616B1 US6323616B1 US09/564,300 US56430000A US6323616B1 US 6323616 B1 US6323616 B1 US 6323616B1 US 56430000 A US56430000 A US 56430000A US 6323616 B1 US6323616 B1 US 6323616B1 Authority US United States Prior art keywords wafer input robot pod output Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents US6323616B1 - Self teaching robotic wafer handling system US6323616B1 - Self teaching robotic wafer handling system